ABSTRACT
We report on the deposition of Pb(Zrx,Ti1 - x)O3 (PZT) thin films by chemical solution deposition (CSD) on stainless steel foils. The electrical characterization proves good ferroelectric properties with a remnant polarization of 38 μ C/cm2. Since PZT is also piezoelectric the 35 μ m and 50 μ m thick metal foils are used to make piezoelectric actuated cantilever beams of several millimeter lengths. Actuated with 10–30 V a displacement up to 32 μ m was measured in quasi-static mode. In resonance mode the displacement increases several times at the same driving voltage.