LARGE AREA PIEZOELECTRIC ACTUATORS USING METAL FOIL SUBSTRATES WITH Pb(Zr_x,Ti_{1 - x})O₃ THIN FILMS

ABSTRACT

We report on the deposition of Pb(Zr_x,Ti_{1 - x})O₃ (PZT) thin films by chemical solution deposition (CSD) on stainless steel foils. The electrical characterization proves good ferroelectric properties with a remnant polarization of 38 μ C/cm². Since PZT is also piezoelectric the 35 μ m and 50 μ m thick metal foils are used to make piezoelectric actuated cantilever beams of several millimeter lengths. Actuated with 10–30 V a displacement up to 32 μ m was measured in quasi-static mode. In resonance mode the displacement increases several times at the same driving voltage.