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Integrated Ferroelectrics
An International Journal
Volume 105, 2009 - Issue 1
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Original Articles

NOVEL DEVICE DESIGN FOR AN ULTRASONIC RANGING SYSTEM

WEN-JUN LIAO Institute of Microelectronics, Tsinghua University, Beijing, 100084, China; Tsinghua National Laboratory for Information Science and Technology, Beijing, 100084, China
,
TIAN-LING REN Institute of Microelectronics, Tsinghua University, Beijing, 100084, China; Tsinghua National Laboratory for Information Science and Technology, Beijing, 100084, China
,
YI YANG Institute of Microelectronics, Tsinghua University, Beijing, 100084, China; Tsinghua National Laboratory for Information Science and Technology, Beijing, 100084, China
,
YUAN REN Institute of Microelectronics, Tsinghua University, Beijing, 100084, China; Tsinghua National Laboratory for Information Science and Technology, Beijing, 100084, China
,
XIANG-MING KONG Institute of Microelectronics, Tsinghua University, Beijing, 100084, China; Tsinghua National Laboratory for Information Science and Technology, Beijing, 100084, China
,
YI-PING ZHU Institute of Microelectronics, Tsinghua University, Beijing, 100084, China; Tsinghua National Laboratory for Information Science and Technology, Beijing, 100084, China
&
LI-TIAN LIU Institute of Microelectronics, Tsinghua University, Beijing, 100084, China; Tsinghua National Laboratory for Information Science and Technology, Beijing, 100084, China
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Pages 53-65 | Received 29 Dec 2008, Published online: 20 Sep 2010
 
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ABSTRACT

This paper presents design method and fabrication process of novel devices which were used in the microelectromechanical systems based ultrasonic ranging system. An acoustical transducer microarray operating in d31 mode which can offer strong directionality with a high radiation acoustic power has been developed to enhance the spatial resolution in the pulse-echo measurement in air while an acoustical transducer operating in d33 mode which has a high isotropic receive sensitivity has been designed to expand the system detection range. The proposed devices based on novel ferroelectric thin film has excellent performance, miniature size and high reliability, and could be fabricated with conventional integrated circuit process.

ACKNOWLEDGMENTS

This work is supported by National Natural Science Foundation of China (90407023), and the China National “863” Program (2006AA04Z872).

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