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Integrated Ferroelectrics
An International Journal
Volume 112, 2010 - Issue 1
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Original Articles

THICKNESS DEPENDENT PROPERTIES OF BARIUM STRONTIUM TITANATE THIN-FILM VARACTORS

GURU SUBRAMANYAM Dept. of Electrical and Computer Engineering, University of Dayton, Dayton, OH, 45469
,
MARK PATTERSON Dept. of Electrical and Computer Engineering, University of Dayton, Dayton, OH, 45469
,
KEVIN LEEDY Air Force Research Lab, Sensors Directorate, WPAFB, Dayton, OH, 45433
,
ROBERT NEIDHARD Air Force Research Lab, Sensors Directorate, WPAFB, Dayton, OH, 45433
,
CHAKRAPANI VARANASI University of Dayton Research Institute, 300 College Park, Dayton, OH, 45469
,
CHENHAO ZHANG Dept. of Electrical and Computer Engineering, University of Dayton, Dayton, OH, 45469
&
GREGG STEINHAUER Analog Bridge Inc., PO Box 340345, Beavercreek, OH, 45434
 show all
Pages 53-59 | Received 27 Sep 2009, Accepted 31 Jan 2010, Published online: 05 Nov 2010
 
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ABSTRACT

Ba0.6Sr0.4TiO3 (BST) thin-films with large dielectric tunability as high as 5.8:1 were obtained using a large area pulsed laser deposition process, with low loss-tangents below 0.01 at zero-bias and 10 GHz. This paper summarizes experimental results obtained on large area processed BST thin film varactors. Varactors with 0.6 μm thick BST films exhibited large dielectric tunability, the relative dielectric permittivity at zero bias of 1280 tuned to 220 at 20 V, at an electric field of 333 kV/cm. The leakage current through the BST film was below 1 nA up to 10 V dc bias. The Quality factor (Q) exceeded 500 at relatively low 10 V dc bias for both 0.6 and 1 μm thick BST varactors.

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