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Integrated Ferroelectrics
An International Journal
Volume 125, 2011 - Issue 1
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Original Articles

Novel Multi-Capacitor Architecture for BST Thin Film Varactors

Guru Subramanyam Department of Electrical and Computer Engineering, University of Dayton, Dayton, OH, 45469
,
Mark Patterson Department of Electrical and Computer Engineering, University of Dayton, Dayton, OH, 45469
,
Kevin Leedy Sensors Directorate, Air Force Research Laboratory, WPAFB, Dayton, OH, 45433
,
Robert Neidhard Sensors Directorate, Air Force Research Laboratory, WPAFB, Dayton, OH, 45433
,
Chakrapani Varanasi University of Dayton Research Institute, 300 College Park, Dayton, OH, 45469
&
Gregg Steinhauer Analog Bridge Incorporated, PO Box 340345, Beavercreek, OH, 45434
Pages 11-19 | Received 11 Aug 2010, Accepted 10 Nov 2010, Published online: 27 Jun 2011
 
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Abstract

Novel Barium Strontium Titanate (BST) thin film varactors with parallel capacitor architecture were designed fabricated and tested. Varactors with 2–6 parallel capacitors were experimentally verified using large area processed bst thin films. The multicapacitor varactor shunt switches provided improved isolation at the expense of higher insertion loss. The multicapacitor varactors yielded reduced overall parasitic series inductance and resistances, resulting in higher quality factor Q. This is the first time such a device is reported.

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