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Abstract
Well-ordered large-area two-dimensionally (2D) periodic and individually addressable metal–ferroelectric–metal (M/F/M) nanocapacitor arrays were fabricated by focused ion beam (FIB) milling with synchronal and serial mode. Scanning electron microscopy (SEM) results indicated that the synchronal mode can fabricate more uniform arrays than serial mode, but the surface of arrays is damaged heavily. The various gray contrasts of domain images can be clearly observed in the M/F/M arrays, and its piezoresponse signal is larger than that of the F/M arrays. Piezoresponse force microscope (PFM) results also indicate that the ion damage can be reduced by top Pt electrode, but cannot be avoided. The displacement-voltage and P-E loops of the M/F/M nanocapacitor are indicative of strong ferroelectricity for the measurements. The remanent polarization is reduced by ion damage, but the coercive field is not increased comparing to the thin film.
Acknowledgment
The project supported by the State Key Laboratory of advanced Technology for Materials Synthesis and Processing (Wuhan University of Technology) (No. 2010-KF-8), the Nature Science Foundation of Hubei Province (No. 2009CDB195), the Research Project of Hubei Provincial Department of Education (No. D20111503) and the National Nature Science Foundation of China (No 51172170). Especially, the authors deeply appreciate professor Jun Yu (Huazhong University of Science and Technology) for the assistance in the experiments.