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Integrated Ferroelectrics
An International Journal
Volume 133, 2012 - Issue 1
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Session C: Electrocalorics and Energy Harvesting

Comparison of the Electrical Properties of ZnO Thin Films on Different Substrates by Pulsed Laser Deposition

M. Echizen Samco Inc., Kyoto, 612-8443, Japan
,
S. Motoyama Samco Inc., Kyoto, 612-8443, Japan
,
T. Tatsuta Samco Inc., Kyoto, 612-8443, Japan
,
O. Tsuji Samco Inc., Kyoto, 612-8443, Japan
,
R. S. Katiyar Department of Physics, University of Puerto Rico, San Juan, 00931-3343, Commonwealth of Puerto Rico
,
A. Kumar Department of Physics, University of Puerto Rico, San Juan, 00931-3343, Commonwealth of Puerto Rico
&
J. F. Scott Department of Physics, Cavendish Laboratory, Cambridge University, Cambridge, CB03 0HE, UK
 show all
Pages 9-14 | Received 01 Aug 2011, Published online: 20 Apr 2012
 
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Abstract

ZnO thin films were deposited on SiO2/Si(100) and single-crystal MgO substrate using pulsed laser deposition. High-quality ZnO thin films were fabricated on both substrates successfully. Interdigital transducer-shaped Al electrodes were used for measuring electrical properties. Electrical current as a function of voltage, temperature-dependent I-V, and impedance of ZnO thin films were measured. ZnO thin films on MgO substrate show ohmic behavior. On the other hand, ZnO thin films on SiO2/Si(100) substrate show good thermal stability but Schottky-like diode behavior.

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