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Abstract
Micro-forming as a kind of metal forming process is very suitable for massive production of micro-parts with high mechanical properties. To eliminate the scaling effects of friction in micro-forming, diamond-like carbon (DLC) film of nano-thickness was deposited on the micro mould with plasma based ion implantation and deposition (PBII&D) method for its excellent tribological behaviors. The effects of mould cavity dimensions were investigated, for example distribution of thickness, surface topography and microstructure of DLC film. The result shows that the thickness of DLC film decreases from 554 nm to 47 nm with the increasing of depth into mould cavity. And ripple topography appears when the cavity dimension is small. The ratio between ID and IG increases with the increasing of cavity dimension, which means that the amount of SP3 bonds becomes smaller. With the DLC film deposited female die, micro-cups of 1.1 mm in diameter were manufactured successfully using copper thin sheet of 0.04 mm in thickness with a blanking-deep drawing process. And the surface quality and dimension accuracy of micro-cup were analyzed in details. The results show that DLC film is feasible alternative to micro-forming.
Acknowledgments
The authors gratefully acknowledge the financial support of the National Science Foundation of China (No. 50835002 and No. 50805035), the Foundation for Innovation Scholars of Harbin (2008RFQXG041) and Key Laboratory Opening Funding of Micro-systems and Micro-structures Manufacturing (Ministry of Education) (HIT. KLOF. 2009008). Authors would like to thank Prof. Xiubo Tian for the help of DLC film deposition.