TCR Sign Variation of Surface Micromachined Polysilicon Resistor under Joule Self-Heating

Abstract

This work reports the sign variation of temperature coefficient of surface micromachined polysilicon resistor due to Joule self-heating effect. It was found that the sign of temperature coefficient of polysilicon resistor with initial negative temperature coefficient value varies two times from negative to positive and then from positive to negative with the consumed power increasing, while the sign of the temperature coefficient of polysilicon resistor with initial positive value only changes once to negative. The experiment results indicate that much more attention should be paid to the temperature coefficient of polysilicon resistor for the surface micromachined electrothermal polysilicon devices.

Keywords:

• Temperature coefficient of resistor (TCR)
• variation
• polysilicon resistor
• surface micromachine
• Joule heating

Acknowledgment

This project is supported by the Open Research Fund of Key Laboratory of MEMS of Ministry of Education (Southeast University), the Priority Academic Program Development of Jiangsu Higher Education Institutions, the Fundamental Research Funds for the Central Universities (under grant No.2011QNB22) and the Projects in the National Science & Technology Pillar Program of China (No. 2012BAH12B01).