Synthesis and Characterization of PZT Thin Films Embedded with WO₃ Nanoparticles by a Hybrid Chemical Solution Route

Abstract

PZT thin films embedded with WO₃ nanoparticles were prepared by a hybrid chemical solution process. WO₃ at 0, 0.1, 0.2, 0.3, 0.4, 0.5 and 1 wt% nanopowders were suspended in an organometallic precursor solution of PZT, and then coated on platinized silicon substrate using spin-coating technique. The increase of WO₃ resulted in a reduction of densification of the films. However, at 1 wt% WO₃ concentration, the reaction between PZT and WO₃ occurred during heat-treatment process at 600°C and seemed to improve the film's density. The WO₃ nanoparticles were also found to affect both dielectric and ferroelectric properties of PZT films. Moreover, the addition of WO₃ nanoparticles was found to improve a fatigue phenomenon in ferroelectric PZT thin films.

Keywords:

• PZT
• WO₃
• Ferroelectric
• Thin Films
• Fatigue

Acknowledgments

This work is financially supported by the Thailand Research Fund (TRF) and the National Research University Project under Thailand's Office of the Higher Education Commission (OHEC). The Faculty of Science and the Graduate School, Chiang Mai University is also acknowledged. T. Sreesattabud would also like to thank the OHEC for supporting a grant under the program Strategic Scholarships for Frontier Research Network for the Join Ph.D. Program Thai Doctoral degree.