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Integrated Ferroelectrics
An International Journal
Volume 141, 2013 - Issue 1
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Original Articles

Structural Investigation of Highly Polarized Single-c-Domain thin Films Grown by Magnetron Sputtering with Raman Spectroscopy

T. Tai Dept. of Com. Eng., Natl. Def. Acad., Kanagawa, Japan
,
K. Wasa Dept. of Micro eng., Kyoto University
,
J. Kim Dept. of Com. Eng., Natl. Def. Acad., Kanagawa, Japan
,
T. Kouzu Dept. of Com. Eng., Natl. Def. Acad., Kanagawa, Japan
,
M. Matsuoka Dept. of Com. Eng., Natl. Def. Acad., Kanagawa, Japan
,
M. Nishide Dept. of Com. Eng., Natl. Def. Acad., Kanagawa, Japan
,
H. Shima Dept. of Com. Eng., Natl. Def. Acad., Kanagawa, Japan
,
K. Nishida Dept. of Com. Eng., Natl. Def. Acad., Kanagawa, Japan
&
Takashi Yamamoto Dept. of Com. Eng., Natl. Def. Acad., Kanagawa, Japan
 show all
Pages 99-104 | Received 30 Jun 2012, Accepted 09 Sep 2012, Published online: 09 May 2013
 
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Abstract

Single-c-domain/single-crystal PZT thin films grown by rf magnetron sputtering on SrRuO3/Pt/MgO substrates was investigated by Raman spectroscopy. The Raman spectroscopy measurement revealed that the sputter deposited thin film has high quality and highly c domain oriented. In addition, Raman spectroscopy revealed the local strain configuration in the sputtered thin films from the surface to the substrates. These local stresses were discussed with dielectric property.

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