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Abstract
We fabricated and evaluated a flowmeter with a corrugation structure for various applications. The device measures the air flow rate using the air drag force, and the corrugation structure is adopted for the more deformation which brings the higher sensitivity. The flowmeter is fabricated with standard CMOS process, and the strain is measured with the piezoresistive material, platinum. The fabricated flowmeter measures the small air flow rate to 0.2 m/s and has a wide measurement range up to 7 m/s. The stability and repeatability characteristics are investigated, and around 5% uniform results are obtained. The flowmeter is used for the 2-dimensional measurement, and the air flow rate and direction are determined with the compensated vector calculation.