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Integrated Ferroelectrics
An International Journal
Volume 150, 2014 - Issue 1
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Original Articles

Substrate Effect on Characteristics of PbZrxTi1−xO3 (PZT) Film

Chin-Chi Cheng Department of Energy and Refrigerating Air-Conditioning Engineering, National Taipei University of Technology, Taipei, Taiwan
,
San-Lin Young Department of Electronic Engineering, Hsiuping University of Science and Technology, Da-Li, Taichung, Taiwan
,
Hone-Zern Chen Department of Electronic Engineering, Hsiuping University of Science and Technology, Da-Li, Taichung, Taiwan
&
Sen-Yeu Yang Department of Mechanical Engineering, National Taiwan University, Taipei, Taiwan
Pages 51-58 | Received 13 Mar 2013, Accepted 07 Jul 2013, Published online: 25 Feb 2014
 
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Abstract

The paper presents the effect of substrates on the characteristics of PbZrxTi1−xO3 (PZT) thin film fabricated by sol-gel spin coating technology. The PZT sol-gel is prepared by mixing PZT powder and PZT solution, and fabricated on various substrates, including copper (Cu), alumina (Al2O3), stainless steel (SS) and titanium (Ti). The dielectric characteristics and orientation of films had been measured by SEM, LCR meter, XRD for comparison. The experimental results indicate that the substrates having the similar characteristics with PZT film would result in better crystallization, charge storage capacity and energy transfer efficiency of film.

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