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Integrated Ferroelectrics
An International Journal
Volume 164, 2015 - Issue 1: Proceedings of The Thirteenth China International Nanoscience and Technology Symposium (CINSTS14) Part V of V
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Original Articles

Local Field Enhancement Characteristics in a Tapered Metal-Coated Optical Fiber Probe for Nanolithography

Jianlei CuiState Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an, 710049, P. R. China;School of Mechanical Engineering, Xi'an Jiaotong University, Xi'an, 710049, P. R. China
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Lijun YangKey Laboratory of Micro-systems and Micro-structures Manufacturing, Ministry of Education, Harbin Institute of Technology, Harbin, 150001, P. R. China;School of Mechatronics Engineering, Harbin Institute of Technology, Harbin, 150001, P. R. ChinaCorrespondence[email protected]
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Yang WangSchool of Mechatronics Engineering, Harbin Institute of Technology, Harbin, 150001, P. R. China
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Xuesong MeiState Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an, 710049, P. R. China;School of Mechanical Engineering, Xi'an Jiaotong University, Xi'an, 710049, P. R. China
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Wenjun WangState Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an, 710049, P. R. China;School of Mechanical Engineering, Xi'an Jiaotong University, Xi'an, 710049, P. R. China
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Chaojian HouKey Laboratory of Micro-systems and Micro-structures Manufacturing, Ministry of Education, Harbin Institute of Technology, Harbin, 150001, P. R. China;School of Mechatronics Engineering, Harbin Institute of Technology, Harbin, 150001, P. R. China
,
Bai ChengKey Laboratory of Micro-systems and Micro-structures Manufacturing, Ministry of Education, Harbin Institute of Technology, Harbin, 150001, P. R. China;School of Mechatronics Engineering, Harbin Institute of Technology, Harbin, 150001, P. R. China
&
Qiang DaiKey Laboratory of Micro-systems and Micro-structures Manufacturing, Ministry of Education, Harbin Institute of Technology, Harbin, 150001, P. R. China;School of Mechatronics Engineering, Harbin Institute of Technology, Harbin, 150001, P. R. China
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Pages 90-97 | Received 30 Jul 2014, Accepted 31 Dec 2014, Published online: 17 Aug 2015
 
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Abstract

In the nanolithography, some exciting developments have been motivated by the tapered metal-coated optical fiber probe irradiated by ultra-fast pulse laser. To explore the related mechanism, the local field is studied using the finite element method in this paper. The simulation results show the reflection at the cut-off plane, edge enhancement effect and surface plasmon resonance become the major factors affecting the near-field. In addition, Based on the near-field distribution and characteristics, the new promising scheme is proposed for near-field nanolithography.

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