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Integrated Ferroelectrics
An International Journal
Volume 184, 2017 - Issue 1: The International Conference on Technologically Advanced Materials (ICTAM-2016), Part I
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Section A: Energy Harvesting

HWCVD of B-doped silicon carbide thin films for SHJ solar cell technology

Jozef HuranInstitute of Electrical Engineering, Slovak Academy of Sciences, Bratislava, SlovakiaCorrespondence[email protected]
,
Miroslav MikolášekFaculty of Electrical Engineering and Information Technology, Slovak University of Technology, Bratislava, Slovakia
,
Milan PernýFaculty of Electrical Engineering and Information Technology, Slovak University of Technology, Bratislava, Slovakia
,
Vladimir ŠályFaculty of Electrical Engineering and Information Technology, Slovak University of Technology, Bratislava, Slovakia
,
Angela KleinováPolymer Institute, Slovak Academy of Sciences, Bratislava, Slovakia
,
Vlasta SasinkováInstitute of Chemistry, Slovak Academy of Sciences, Bratislava, Slovakia
,
Alexander P. KobzevJoint Institute for Nuclear Research, Dubna, Russian Federation
&
Juraj ArbetInstitute of Electrical Engineering, Slovak Academy of Sciences, Bratislava, Slovakia
 show all
Pages 23-31 | Received 07 Nov 2016, Accepted 22 Apr 2017, Published online: 05 Dec 2017
 
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ABSTRACT

Boron-doped SiC thin films were deposited on N-type Si(100) substrates at various deposition conditions by means of HWCVD technology using silane (SiH4), methane (CH4), hydrogen(H2), diborane (B2H6, 5vol.% in H2) and argon (Ar) gas as precursors. Elements concentration was determined by RBS and ERD method. Chemical compositions were analyzed by FTIR and Raman spectroscopy. Solar cell structure with top grid Al electrode was prepared to investigate the photovoltaic response and to gain insight about the quality of films and their suitability for photovoltaic applications. Comparison of open-circuit voltage (VOC), short-circuit current (Isc), fill factor (FF) and efficiency (Ef) was discussed.

Funding

This research has been supported by the Slovak Research and Development Agency under the contracts APVV-0443-12 and by the Scientific Grant Agency of the Ministry of Education and Sport of the Slovak Republic and Slovak Academy of Sciences, No. 1/0651/16.

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