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Integrated Ferroelectrics
An International Journal
Volume 183, 2017 - Issue 1
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Original Articles

Design and implementation of combline bandpass tunable filter using barium-strontium-titanate thin-film capacitors

Lang LiuState Key Laboratory of Electronic Thin Films and Integrated Devices, University of Electronic Science & Technology of China, Chengdu, Sichuan, P. R. China;Collaboration Innovation Center of Electric Materials and Devices, University of Electronic Science & Technology of China, Chengdu, Sichuan, P. R. China
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Hongwei ChenState Key Laboratory of Electronic Thin Films and Integrated Devices, University of Electronic Science & Technology of China, Chengdu, Sichuan, P. R. China;Collaboration Innovation Center of Electric Materials and Devices, University of Electronic Science & Technology of China, Chengdu, Sichuan, P. R. ChinaCorrespondence[email protected]
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Jihua ZhangState Key Laboratory of Electronic Thin Films and Integrated Devices, University of Electronic Science & Technology of China, Chengdu, Sichuan, P. R. China;Collaboration Innovation Center of Electric Materials and Devices, University of Electronic Science & Technology of China, Chengdu, Sichuan, P. R. ChinaORCID Iconhttp://orcid.org/0000-0003-3136-1194
ORCID Icon,
Yu TanState Key Laboratory of Electronic Thin Films and Integrated Devices, University of Electronic Science & Technology of China, Chengdu, Sichuan, P. R. China;Collaboration Innovation Center of Electric Materials and Devices, University of Electronic Science & Technology of China, Chengdu, Sichuan, P. R. China
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Wenjun WangState Key Laboratory of Electronic Thin Films and Integrated Devices, University of Electronic Science & Technology of China, Chengdu, Sichuan, P. R. China;Collaboration Innovation Center of Electric Materials and Devices, University of Electronic Science & Technology of China, Chengdu, Sichuan, P. R. China
&
Chuanren YangState Key Laboratory of Electronic Thin Films and Integrated Devices, University of Electronic Science & Technology of China, Chengdu, Sichuan, P. R. China;Collaboration Innovation Center of Electric Materials and Devices, University of Electronic Science & Technology of China, Chengdu, Sichuan, P. R. China
Pages 126-135 | Received 23 Dec 2016, Accepted 23 Aug 2017, Published online: 11 Dec 2017
 
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ABSTRACT

The design, fabrication and microwave properties of tunable fifth-order combline bandpass filter using etched barium-strontium-titanate (BST) thin films on sapphire (0001) substrates were investigated. At 1 MHz and 1000 kV/cm electric field, the dielectric tunability, the remanent polarization (2Pr) and the coercive electric field (2EC) of BST films were 45.96%, 2.26 µC/cm2 and 81.83 kV/cm, respectively. The loss tangent was 1.36% at zero electric field. After the BST parallel plate capacitors characterization, BST capacitors were loaded at the end of parallel coupled resonators in the design of the tunable filter. With the application of 20 V DC voltage, the center frequency of the filter varied from 1.17 GHz to 1.34 GHz which corresponds to a relative shift of 13.5%.

Funding

This work was supported by the Innovation Foundation of Collaboration Center of Electronic Materials and Devices (No. ICEM2015-4002).

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