Experimental study on bi-directional friction linear micro-motor driven by a set of micro-actuator

ABSTRACT

This paper presents a bi-directional friction linear micro-motor (BFLM), which is driven by a set of micro-actuator through friction drive. The BFLM has been fabricated using PolyMUMPs process. The forward and backward movement displacement, velocity and acceleration of the slider are measured. Movement velocities of the slider can be controlled by changing the driving frequency. It is feasible to use one set of actuator to driving the slider bidirectional motion. The BFLM is operated at square-wave frequencies with 38.39 kHz to get the maximum displacement of 100 µm and the average velocities are 10.709 µm/s in forward movement and 10.321 µm/s in backward movement.

KEYWORDS:

• MEMS
• actuator
• friction linear micro-motor
• bi-directional motion

Acknowledgments

The authors would like to gratefully acknowledge the supports from the Research Initiation Funds for the Doctor of Lanzhou City University (LZCU-BS2015-05), the Teaching Reform Research Project of Lanzhou City University (2017-jy-30) and the Key Subject of Lanzhou City University.

Additional information

Funding

Natural Science Foundation of Gansu Province of China [145RJZA085]; Research Initiation Funds for the Doctor of Lanzhou City University [LZCU-BS2015-05].