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Integrated Ferroelectrics
An International Journal
Volume 221, 2021 - Issue 1
128
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Research Article

FBG Hydrogen Sensor Based on Pd87–Ni13/Pd4–Ag1 Thin Film and Femtosecond Laser Ablation

, , , , , & show all
Pages 1-11 | Received 21 Nov 2019, Accepted 31 Mar 2020, Published online: 14 Dec 2021
 

Abstract

A novel laser machined spiral microstructure fiber Bragg grating (FBG) hydrogen sensor and coated with composite sensing film is presented. The sensor probes are sputtered with Pd/Ni and Pd/Ag film, respectively. Experimental results exhibit that a pitch 60 μm FBG with double spiral microstructures, coated with 520 nm Pd/Ni and Pd/Ag film has hydrogen gas sensitivity in air of 13 pm/%H and 25 pm/%H, respectively. The laser-ablated spiral microstructured probes with composite films shown greater sensitivity compared with standard FBG probes with similar coating. The optimum testing temperature (50 °C) enhanced the sensitivity and repeatability of the probes.

Additional information

Funding

This work was supported by the National Natural Science Foundation of China under grant 51975192, 51975442, the Natural Science Foundation of Hubei Province under grant 2019CFB632, and the Ph.D. Research Fund of Hubei University of Arts and Science (No. 2059016), Hubei Superior and Distinctive Discipline Group of “Mechatronics and Automobiles” (XKQ2021050).

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