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Integrated Ferroelectrics
An International Journal
Volume 213, 2021 - Issue 1
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Research Article

Analytical Study of the Film Bulk Acoustic Resonators Based on Single Crystal LiNbO3 with Different Crystal Orientations

Weipeng Xuana Ministry of Education Key Laboratory of RF Circuits and Systems, College of Electronics & Information, Hangzhou Dianzi University, Hangzhou, China;d Key Laboratory of Advanced Micro/Nano Electronics Device & Smart System of Zhejiang, College of Information Science & Electronic Engineering, Zhejiang University, Hangzhou, ChinaCorrespondence[email protected]
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Feng Gaob College of Science and Engineering, Hamad Bin Khalifa University, Doha, QatarView further author information
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Xingli Hec School of Electronic and Information Engineering, Soochow University, Suzhou, ChinaView further author information
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Ting Wud Key Laboratory of Advanced Micro/Nano Electronics Device & Smart System of Zhejiang, College of Information Science & Electronic Engineering, Zhejiang University, Hangzhou, ChinaView further author information
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Jinkai Chena Ministry of Education Key Laboratory of RF Circuits and Systems, College of Electronics & Information, Hangzhou Dianzi University, Hangzhou, ChinaView further author information
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Hao Jind Key Laboratory of Advanced Micro/Nano Electronics Device & Smart System of Zhejiang, College of Information Science & Electronic Engineering, Zhejiang University, Hangzhou, ChinaView further author information
,
Shurong Dongd Key Laboratory of Advanced Micro/Nano Electronics Device & Smart System of Zhejiang, College of Information Science & Electronic Engineering, Zhejiang University, Hangzhou, ChinaView further author information
,
Xiaozhi Wangd Key Laboratory of Advanced Micro/Nano Electronics Device & Smart System of Zhejiang, College of Information Science & Electronic Engineering, Zhejiang University, Hangzhou, ChinaView further author information
&
Jikui Luoa Ministry of Education Key Laboratory of RF Circuits and Systems, College of Electronics & Information, Hangzhou Dianzi University, Hangzhou, China;d Key Laboratory of Advanced Micro/Nano Electronics Device & Smart System of Zhejiang, College of Information Science & Electronic Engineering, Zhejiang University, Hangzhou, ChinaView further author information
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Pages 182-193 | Received 16 Aug 2020, Accepted 15 Nov 2020, Published online: 28 Feb 2021
 
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Abstract

Film bulk acoustic resonator (FBAR) based on single crystal LiNbO3 are promising for next-generation high Q, wideband filters in telecommunications. The crystal orientation of LiNbO3 has significant impacts on the FBAR performance, and the bulk acoustic wave (BAW) velocity was calculated by solving the Christoffel’s equation in each crystal orientation. The electromechanical coupling coefficient of every cut was obtained. Moreover, the impedance information and the film displacement of various crystal orientations were analyzed by the finite element method (FEM). Analytical results demonstrate that the effective coupling coefficient and the number of BAW modes vary with the crystal orientation.

Additional information

Funding

Open Access funding provided by the Qatar National Library. This work was supported by the following programs: National Key R&D Program of China (No. 2018YFB2002500), National Natural Science Foundation of China (No. 61801158, 61974037, 61904042, 61827806), NSFC-Zhejiang Joint Fund for the Integration of Industrialization and Information (No. U1909212), Zhejiang Province Key R & D programs (Nos. 2021C05004, 2018C01048, 2018C01037) and Zhejiang Lab (No. 2018EB0ZX01). This work was also supported by the open project of Zhejiang Provincial Key Laboratory of Advanced Microelectronic Intelligent Systems and Applications.

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