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Integrated Ferroelectrics
An International Journal
Volume 219, 2021 - Issue 1: Proceedings of the Nineteenth China International Nanoscience and Technology Symposium (CINSTS20), Part V of V
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Research Article

Study on Micromachining of Polycrystalline Diamond by UV Nanosecond Laser

Xuyang Fanga State Key Laboratory for Manufacturing Systems Engineering, Xi’an Jiaotong University, Xi’an, P.R. China;b Shaanxi Key Laboratory of Intelligent Robots, Xi'an Jiaotong University, Xi'an, P.R. ChinaView further author information
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Jianlei Cuia State Key Laboratory for Manufacturing Systems Engineering, Xi’an Jiaotong University, Xi’an, P.R. China;b Shaanxi Key Laboratory of Intelligent Robots, Xi'an Jiaotong University, Xi'an, P.R. China;c Department of Project, Xi’an Jiaotong University Shenzhen Research Institute, Shenzhen, P.R. ChinaCorrespondence[email protected]
View further author information
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Zhengjie Fana State Key Laboratory for Manufacturing Systems Engineering, Xi’an Jiaotong University, Xi’an, P.R. China;b Shaanxi Key Laboratory of Intelligent Robots, Xi'an Jiaotong University, Xi'an, P.R. China;c Department of Project, Xi’an Jiaotong University Shenzhen Research Institute, Shenzhen, P.R. ChinaView further author information
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Zheng Suna State Key Laboratory for Manufacturing Systems Engineering, Xi’an Jiaotong University, Xi’an, P.R. China;b Shaanxi Key Laboratory of Intelligent Robots, Xi'an Jiaotong University, Xi'an, P.R. ChinaView further author information
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Xuesong Meia State Key Laboratory for Manufacturing Systems Engineering, Xi’an Jiaotong University, Xi’an, P.R. China;b Shaanxi Key Laboratory of Intelligent Robots, Xi'an Jiaotong University, Xi'an, P.R. ChinaView further author information
Pages 28-38 | Received 10 Oct 2020, Accepted 15 Feb 2021, Published online: 23 Sep 2021
 
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Abstract

A single-wire cutting experiment on the polycrystalline diamond by UV nanosecond laser was carried out. The result was characterized and analyzed by the scanning electron microscope and XPS energy spectrum analysis. It found that the width and depth of grooves continue to increase with the increasing of laser power, scanning times, and the decreasing of scanning speed. A finer groove with a narrower width and deeper depth can be obtained by adjusting the focus point on the surface of the PCD material. XPS spectrum of C1s indicated that sp3 structure converts to the sp2 graphite phase and removed by photochemical mechanism when the UV nanosecond laser irradiates the PCD. Moreover, the cutting result suggests that UV nanosecond laser can achieve finer processing of PCD material.

Acknowledgment

All the authors gratefully acknowledge the financial support.

Additional information

Funding

This work is supported by the Key-Area Research and Development Program of Guangdong Province (2018B090905003), Joint Fund for Equipment Pre-Research of the Ministry of Education (Young Talents Program) (6141A02033118), the Science and Technology Innovation Commission Shenzhen (JCYJ20180306170821261), National Natural Science Foundation of China (51735010).

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