Surface Morphology and Optical Mutation Properties of V₂O₅ Films Prepared with Different Oxygen Partial Pressures

Abstract

vanadium pentoxide films(V₂O₅) were deposited on sapphire substrates under four different oxygen partial pressures by magnetron sputtering. Then the films’ crystallinity, surface morphology and optical mutation properties were researched. The results show that all the prepared films are polycrystalline V₂O₅, and the crystallization performance gets better with the oxygen pressure increases. In addition, the Root-Mean-Square(RMS) roughness decrease with the increase of oxygen pressure. Furthermore, with the oxygen pressure increases, the optical turn-off time and turn-on time are 2.2 and 36 ms, respectively down to 1.7 and 30 ms, and before/after phase-change transmittance, meanwhile, decreases from 75%/20% to 57%/11%, showing a great improvement in optical mutation properties.

Keywords:

• V₂O₅ films
• oxygen partial pressure
• surface morphology
• optical mutation properties

Additional information

Funding

This study is supported by the Natural Science Foundation of Shandong Province (Grant. NO. ZR2020QE183), the Science and Technology Project for the Universities of Shandong Province (Grant No.J18KA014) and the Qingdao Postdoctoral Application Research Project.