A Study on Liquid Hybrid Material for Waveguides—Synthesis and Property of PSQ‐Ls for Waveguides

Silicate‐based inorganic‐organic hybrid polymer systems have many unique properties including thermal stability and photo‐stability, chemical resistance with the combination of tunable optical properties. Two kinds of new UV‐patternable hybrid materials PSQ‐Ls were synthesized by a sol‐gel process at room temperature, which can be used for low cost fabrication of optical waveguides. Thick films (up to 8.31 µm) can be coated by a single spin‐coating process without any cracking and the average surface roughness (Ra), detected by atomic force microscopy (AFM), is below 0.5 nm. The optical properties (refractive index, birefringence, and optical loss at 1310 nm and 1550 nm, respectively) of the PSQ‐Ls films are investigated by a prism coupler. The refractive index of PSQ‐Ls can be exactly tuned from 1.4483 to 1.5212 by blending PSQ‐LH (n_TE=1.5212 @ 1310 nm) and PSQ‐LL (n_TE=1.4483 @ 1310 nm). The maximum refractive index contrast is about 4.8%. After post‐baking, birefringences of the films are below 0.0005 and optical losses are about 0.2 dB · cm⁻¹ at 1310 nm, 0.7 dB · cm⁻¹ at 1550 nm, respectively. Furthermore, the PSQ‐Ls films also show outstanding thermal stability in air atmospheres.

Keywords:

• hybrid material
• sol‐gel
• waveguide
• hybrid polymerization

5 Acknowledgments

This work was performed with support from the National Natural Science Foundation of China (No. 50143013 and No. 60577014).