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Articles

Recent advances in decomposition of the most potent greenhouse gas SF6

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Pages 1763-1782 | Published online: 18 Dec 2017
 

ABSTRACT

The continuously increasing commercial use of SF6 in the power industry, semiconductor manufacturing industry, and other related industries has led to a great increase in global total SF6 emission amount and the SF6 concentration in the atmosphere. The SF6 abatement strategies had received special attention due to the fact that SF6 has very high global warming potentials and long atmospheric lifetime. This paper reviews and summarizes the research findings on the various approaches and methods that are currently being used or under investigation. Particular interest is given to the development of nonthermal plasma techniques for the removal of SF6.

Additional information

Funding

This work was supported by the National Natural Science Foundation of China under Grant 51777144.

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