The theory of electron energy-loss near-edge structure

Abstract

This paper presents a complete theory of electron energy-loss near-edge structure, which appears near atomic core-electron excitation edges in the energy-loss spectrum of fast electrons transmitted through a thin crystal. In order to extract the maximum information from spectra recorded during microanalysis in the electron microscope, it is necessary to have a full understanding of the dynamical scattering of the transmitted fast electrons as well as the multiple scattering of the ejected core electrons. This is provided within the framework of a unified theory. Also considered are the effects of the ‘non-dipole’ terms in the electron excitation process, and of a finite electron collection aperture.