Research on effect of seed crystal on piezoelectric effect characteristics in quartz wafer

ABSTRACT

A multi-component measurement system centred on piezoelectric force sensor is an important mechanical measurement device, in which the piezoelectric sensor is mainly composed of force-sensitive components. The force-electric conversion performance of quartz wafer containing seed crystal and quartz crystal wafers is the main issue of the research in this paper. In the way of microscopic imaging and X-ray diffraction spectrum analysis, based on macroscopic physical properties of crystals, the theoretical basis of piezoelectric effects and the Neumann principle of elastic mechanics, both kinds of crystals have the same matrix of positive piezoelectric effects. Through static and continuous loading tests on quartz wafer containing seed crystal and ordinary quartz wafer, the maximum deviation of the electric charge, respectively, generated by X0° and Y0°cut type seed crystal wafers and ordinary quartz wafer in the static test under the same vector force loading is finally obtained, both seed-containing wafer and ordinary quartz wafer have excellent linearity. In continuous loading test, seed-containing wafer also has good continuous loading performance and can maintain a stable charge output under quasi-static input. Therefore, it is concluded that seed crystal wafers can also be used for actual testing.

KEYWORDS:

• Seed crystal
• quartz wafer
• piezoelectric effect
• vector force test

Disclosure Statement

No potential conflict of interest was reported by the authors.

Additional information

Funding

This project is supported by National Natural Science Foundation of China [Grant No. 51475078 and Grant No. 51675084], Aeronautical Science Foundation of China [Grant No. 20160163001].

Notes on contributors

Jun Zhang

Jun Zhang, male, professor, mechanical engineering school, Dalian University of Technology. Research direction: Research on Sensor and Actuator Theory, piezoelectric quartz, piezoelectric ceramic mechanism, piezoelectric cutting test system, and precision instrument design and manufacturing. Research contents: piezoelectric mechanism, piezoelectric sensor, dynamometer development, force/force vector test system development.

Yu Han

Yu Han, male, master candidate, Dalian University of Technology. Research contents: Piezoelectricdynamometer, calibration and measurement of six-dimension force.

Zongjin Ren

Zongjin Ren, male, associate professor, mechanical engineering school, Dalian University of Technology. Research on Piezoelectric Mechanism and Piezoelectric Sensors in Aerodynamics.

Jun Shao

Jun Shao, male, master candidate, Dalian University of Technology. Research contents: Piezoelectricdynamometer, calibration and measurement of six-dimension force.

Bing Wang

Bing Wang, male, master candidate, Dalian University of Technology. Research contents: Piezoelectricdynamometer, calibration and measurement of six-dimension force.

Zhenyuan Jia

Zhenyuan JIA, male, professor, mechanical engineering school, Dalian University of Technology. Research on Sensor measurement and control technology.