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Abstract
In this study, an empirical model based on finite element simulations is presented for residual stress determination from the elastic recovery of nanoindentation. Finite element simulations show that the ratio of elastic recovery of nanoindentation to the maximum penetration depth, h e /h max, has a linear relationship to the ratio of residual stress to yield stress, σ r/σy , and increases for compressive residual stress, whereas it decreases for tensile stress. Nanoindentation tests performed on a bent fused quartz beam in this study, and on diamond-like carbon (DLC) and Au coatings in the literature, also confirm the existence of residual stress effects on the elastic recovery of nanoindentation. The empirical model has been used to derive the plastic properties and to estimate the residual stress of the mechanically polished fused quartz beam.
Acknowledgments
Financial support for this study was provided by the National Science Foundation (Grant No. EPS-0296165), the ACS Petroleum Research Fund (ACS PRF# 40450-AC10), and the University of South Carolina NanoCenter Seed Grant. The content of this information does not necessarily reflect the position or policy of the Government and no official endorsement should be inferred.