Strain relaxation in epitaxial GaAs/Si (0 0 1) nanostructures

Abstract

Crystal defects, present in ~100 nm GaAs nanocrystals grown by metal organic vapour phase epitaxy on top of (0 0 1)-oriented Si nanotips (with a tip opening 50–90 nm), have been studied by means of high-resolution aberration-corrected high-angle annular dark-field scanning transmission electron microscopy. The role of 60° perfect, 30° and 90° Shockley partial misfit dislocations (MDs) in the plastic strain relaxation of GaAs on Si is discussed. Formation conditions of stair-rod dislocations and coherent twin boundaries in the GaAs nanocrystals are explained. Also, although stacking faults are commonly observed, we show here that synthesis of GaAs nanocrystals with a minimum number of these defects is possible. On the other hand, from the number of MDs, we have to conclude that the GaAs nanoparticles are fully relaxed plastically, such that for the present tip sizes no substrate compliance can be observed.

Keywords:

• Dislocations
• stacking faults
• twins
• strain relaxation
• HAADF-STEM
• GaAs
• Si nanostructures

Acknowledgements

The authors would like to thank Prof. G.-L. Bona for valuable suggestions and comments on the topic. Access to the TEM facilities at IBM Research-Zürich, Switzerland, under the IBM/Empa Master Joint Development Agreement is gratefully acknowledged.