Abstract
It has been shown that low size dispersion systems of carbon nanoclusters can be fabricated by ion irradiation of fullerite C60 film through a special mask. As the mask, lavsan track membrane with more or less equal pinholes of diameter of about 60 nm was used. STM study showed that fabricated clusters have a form of the cone‐like island with average diameter of about 60 nm and height of about 5 nm.
Acknowledgments
The research was supported by the INTAS grant No 2001‐2136, by the Russian Academy of Sciences (program “Influence of atomic and electronic structure on the condensed matter properties”) and by the contract ИН‐13.5/002 of the Agency of Science.