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Soft Materials Volume 4, 2007 - Issue 2-4: Preceramic Polymers
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Original Articles

Helium‐Permselective Amorphous SiC Membrane Modified by Chemical Vapor Infiltration

Takayuki Nagano Japan Fine Ceramics Center, 2‐4‐1, Mutsuno, Atsuta‐ku, Nagoya, Japan
,
Koji Sato Japan Fine Ceramics Center, 2‐4‐1, Mutsuno, Atsuta‐ku, Nagoya, Japan
,
Shinji Fujisaki Japan Fine Ceramics Center, 2‐4‐1, Mutsuno, Atsuta‐ku, Nagoya, Japan
,
Tomohiro Saitoh Japan Fine Ceramics Center, 2‐4‐1, Mutsuno, Atsuta‐ku, Nagoya, Japan
&
Yuji Iwamoto Japan Fine Ceramics Center, 2‐4‐1, Mutsuno, Atsuta‐ku, Nagoya, JapanCorrespondence[email protected]
Pages 109-122 | Received 19 Jul 2006, Accepted 08 Dec 2006, Published online: 05 Jun 2007
 
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Helium‐permselective silicon carbide (SiC) membrane was successfully synthesized on an outer surface of γ‐alumina‐coated α‐alumina porous support by both pyrolysis of polycarbosilane without oxygen‐curing process and chemical vapor infiltration (CVI). An amorphous SiC membrane possessed He permeance of 7.7×10−8 mol · m−2 · s−1 · Pa−1, He/CO2 permselectivity of 64, and He/H2 permselectivity of 4.4 at 873 K. CVI process is an effective way to increase permselectivity of gases with small kinetic diameter.

Acknowledgment

This work was carried out as a part of the R&D Project on “Highly Efficient Ceramic Membranes for High‐Temperature Separation of Hydrogen” supported by the New Energy and Industrial Technology Development Organization (NEDO), Japan.

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