Nanometric positioning accuracy in the presence of presliding and sliding friction: Modelling, identification and compensation

ABSTRACT

Presliding and sliding frictional effects, limiting the performances of ultrahigh precision mechatronics devices, are studied in this work. The state-of-the-art related to frictional behavior in both motion regimes is, hence, considered, and the generalized Maxwell-slip (GMS) friction model is adopted to characterize frictional disturbances present in a micromanipulation device. All the parameters of the model are identified via experimental set-ups and included in the overall MATLAB/SIMULINK model. With the aim of compensating frictional effects, the modelled response of the system is thus compared to experimental results when using proportional-integral-derivative (PID) control, feed-forward model-based compensation and a self-tuning adaptive regulator. The adaptive regulator proves to be the most efficient and is, hence, used in the final repetitive point-to-point positioning tests allowing to achieve nanometric precision and accuracy.

KEYWORDS:

• Friction identification and compensation
• GMS friction model
• handling of microparts
• nanometric precision and accuracy
• self-tuning adaptive PID