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Molecular Crystals and Liquid Crystals Volume 470, 2007 - Issue 1
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Original Articles

Characteristics of ITO Thin Films for Organic Light Emitting Diode by using a Low-Frequency Magnetron Sputtering Method

Myung Chan Kim Mobile Display Research Center, Kyungpook National University, Daegu, Korea
,
Sang Ho Sohn Department of Physics, Kyungpook National University, Daegu, KoreaCorrespondence[email protected]
,
Duck Kyu Park Department of Physics, Kyungpook National University, Daegu, Korea
,
Sang Kooun Jung Department of Physics, Kyungpook National University, Daegu, Korea
,
Eun Lyoung Kim Department of Physics, Kyungpook National University, Daegu, Korea
,
Yun Su Lee Advanced Display Manufacturing Research Center, Kyungpook National University, Daegu, Korea
,
Youngjune Hur Advanced Display Manufacturing Research Center, Kyungpook National University, Daegu, Korea
,
Lee Soon Park Advanced Display Manufacturing Research Center, Kyungpook National University, Daegu, Korea
&
Kyu-Han Choi Advanced Display Manufacturing Research Center, Kyungpook National University, Daegu, Korea
 show all
Pages 251-257 | Published online: 22 Sep 2010
 
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Abstract

In this study, we have tried the growth of indium tin oxide (ITO) thin films by using low-frequency magnetron sputtering method (LFMSM). Characteristics of ITO thin films deposited on polyethersulfone (PES) and polyetyleneterephthalate (PET) substrates are investigated. Experiments were carried out as a function of deposition time. With increasing the deposition time of the ITO thin films on PES substrate, the sheet resistance is decreased. ITO thin films on polymer substrates were amorphous structure.

Acknowledgments

This work was supported by the Industrial Technology Infrastructure Promotion Program of the Ministry of Commerce, Industry and Energy of Korea.

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