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Molecular Crystals and Liquid Crystals Volume 564, 2012 - Issue 1: Proceedings of the 15th International Symposium on Advanced Display Materials and Devices (Part II of III)
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THIN FILM

Investigation of Barrier Layer Deposited on Flexible Polymers Substrate by Facing Target Sputtering System

Sang Hyun Cho Department of Materials Science and Engineering, Pusan National University, Busan, 609-735, Korea; Nano Convergence Research Team, Nano Convergence Practical Application Center, Daegu Technopark, Daegu, 704-801, Korea
,
Sung Ho Lee Department of Materials & Energy Engineering, Kyungwoon University, Gumi, Gyeongbuk, 730-739, Korea
,
Hyo Jin Kim Nano Convergence Research Team, Nano Convergence Practical Application Center, Daegu Technopark, Daegu, 704-801, Korea
&
Pung Keun Song Department of Materials Science and Engineering, Pusan National University, Busan, 609-735, Korea
Pages 178-184 | Published online: 20 Aug 2012
 
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Abstract

A multilayer structure consisting of an indium tin oxide conducting layer, and a multi component barrier film (SiO2 and ITO) on polyethylenenapthalate is proposed as a transparent flexible substrate for flat panel displays and photovoltaic. The ITO and barrier films were deposited by DC magnetron sputtering and a facing target sputtering (FTS) system, respectively. To improve the multilayer film properties, a 30, 50, 80 nm-thick barrier layer was sputtered by FTS method prior to the ITO film sputtering process. The ITO films on the barrier film showed good properties due to the decreased lattice mismatch between the ITO and barrier film.

Acknowledgment

This work was supported by the Ministry of Knowledge Economy (MKE) grant funded by the Korea government. This work was partially supported by KBSI (Korea Basic Science Institute) grant K3108B.

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