Influence of Deposition Rate on Optical Properties of RF-Magnetron Sputtered Carbon–Nickel Composite Films Deposited at Different Deposition Times

Abstract

In this work, the optical properties of carbon–nickel films deposited at different deposition times from 50 to 600 sec were investigated. Reflectance measurements in wavelength range 300–1000 nm were used to compute the refractive index and optical dispersion parameters according to Wemple and DiDomenico single oscillator model (WDD). Dispersion curves of the refractive index of films show anomalous dispersion in absorption region and normal dispersion in transparent region. It is shown that dissipative rate of the electromagnetic wave at 180 sec has a maximum value. It is also shown that at 180 sec films become more disordered.

Keywords:

• Carbon–nickel
• deposition rate
• deposition times
• RF-magnetron