Deposition of Nanoscale Films on the Nanopore‐arrayed Template by an In‐situ Spinning‐precipitated Technique

A spinning‐precipitated technique is proposed to fabricate nanoscale films. In this study, the deposition of MnZn ferrite on the template of nanoporous anodic oxide alumina (AAO) is demonstrated. The liquid solutions for precipitating MnZn ferrite were citrated in turn in the center of the spin plate, and impinged on the target due to the applied centrifugal force. The MnZn ferrite is precipitated on the plane of AAO with the island growth mode at the initial stage. With increasing the precipitation time, the precipitated area would extend to cover the nanopores via the side growth. As a result, the thickness of the deposited thin film can be well controlled in the nanoscale by the island and side growth mode. On the other hand, the nanopores of the template are free from the deposition of the MnZn ferrite due to the spinning.

Keywords:

• MnZn ferrite
• thin films
• spinning
• deposition
• precipitation

Acknowledgments

The authors would like to thank the financial support from the National Science Foundation of Taiwan with the grand number of NSE 95‐2221‐E‐606‐001.