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Original Articles

Imaging of a Straight Edge in Partially Coherent Illumination in the Presence of Spherical Aberrations

Pages 223-236 | Published online: 11 Nov 2010
 

Abstract

The general transmission factors for line structures, when illuminated with partially coherent light and imaged by a system with spherical aberrations, are calculated and discussed. The theory is adapted to a practical case when a sharp edge is imaged by a microscope objective. The experimental results show good agreement with the theoretically computed intensity distributions.

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