Abstract
In this paper recent progress in micro/nano-particle manipulation and particle–substrate adhesion studies is reviewed. Various particle manipulation and particle–substrate adhesion measurement techniques are summarized. An atomic force microscope (AFM) is the most commonly used tool for particle manipulation, and there are also some custom-made devices that employ different interactions such as van der Waals, electrostatic and capillary forces to manipulate micro/nano-particles. In particle–substrate adhesion study, the contact-based measurement techniques such as pull-off test and lateral push test explore the adhesion between a single particle and a substrate, while non-contact adhesion measurement techniques such as electric field detachment and centrifugal detachment methods simultaneously explore the adhesion properties of a group of particles. Also reviewed are recent studies on factors that affect the particle–substrate adhesion, including surface roughness, electrostatic charge and relative humidity.