Simulation and experiment of specimen size on the effect of laser scribing width and depth of Al₂O₃ ceramics

Abstract

Laser scribing is one of important process in the fields of hard, brittle materials such as silicon and ceramics, films and glasses. To obtain high precision and quality, people should consider all influential factors of laser scribing such as laser scribing parameters and the geometries of specimen size. In this paper, the effect of specimen size on laser scribing width and depth of Al₂O₃ ceramics was simulated and verified by using ANSYS software and Diode Pumped Solid State laser scribing, respectively. The calculated results and the experimental results all proved that the specimen size had important effect on laser scribing width and depth due to the heat accumulation effect during the laser scribing.

Keywords:

• Laser scribing
• ANSYS software
• Simulation
• Al₂O₃ ceramics
• Heat accumulation effect