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Abstract
A novel hybrid technique of combining an improved morphological gradient operator and Zernike moments, named MGZ edge detection algorithm, is developed to meet the stringent requirements for measuring accuracies of charge coupled device metrology system. The mathematical morphological gradient and Zernike moment algorithm are discussed based on the pixels grey-scale and spatial structure information of the images. To improve the algorithm process, the image edge is oriented and extracted by using improved morphological gradient operator firstly; then, the calculation errors of the typical ideal step edge model are analysed and corrected by the proposed error compensation formula. The edge point is relocated with sub-pixel accuracy by means of Zernike moment operator based on the edge point vectors and the threshold value. Finally, the sub-pixel edge detecting of the image is attained. The extensive experimental results show that the measuring error of the edge point is compensated reliably and accurately, and the new algorithm has short operation time, more precise and stronger robustness to noise than the prior similar algorithms. Meanwhile, the proposed method can well meet the need of charge coupled device metrology system for sub-pixel edge detection.
The work was supported by the Natural Science Foundation of Shandong Province (No. ZR2011FQ033 and No. ZR2009CM085), Jinan Youth Science and Technology Star Project (20110302), International Science and Technology Cooperation Grant (No. BZ2010060), a Project of Shandong Province Higher Educational Science and Technology Program (No. J09LF23) and a Project of Shandong Province Traditional Chinese Medicine Technology Program (No. 2009-027).