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Abstract
The post-treatment of ion implantation on hard coatings attracts a great deal of attention because of the improvement in coating surface properties. The present research investigates the effect of nitrogen (N), carbon (C) and carbon followed with nitrogen (C+N) ion implantations on the structural and mechanical properties of the Ti–Al–Si–N coatings. Ion implantations were performed at an energy of 50 keV and different doses. The surface properties of the implanted layer were identified by a variety of analytic techniques, such as cross-sectional transmission electron microscopy, energy dispersive spectroscopy, Raman spectroscopy, X-ray photoelectron spectroscopy and nanoindentation measurement. Additionally, the wear performance of the samples was evaluated by a typical ball on disc tribometer in dry conditions. The results showed that the surface properties depended strongly on the implanted species and doses. In addition, a great improvement in the wear was observed on the samples with the post-treatment process of C and C+N ion implantations.
The work described in this paper was fully supported by the GRF (grant no. CityU116807) from HKSAR Research Grant Council.