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Abstract
Transmission laser bonding of dissimilar and biocompatible materials has a potential application in biomedical implants. The reliability of wafer bonding between polyethylene therephthalate and glass with Ti coating is quite dependent on the surface condition of Ti film. Ti coatings were deposited on glass substrates using radio frequency magnetron sputtering. Ti coatings with different thicknesses between 60 and 150 nm showed varying surface morphology. The effect of film thickness of Ti coating on bonding quality was studied by optical profilometer and true colour confocal microscopy for materials. X-ray photoelectron spectroscopy (XPS) was used to study the bonding mechanism by evaluating the formation of chemical bond during laser bonding process. The XPS results give evidence for the formation of Ti–C and Ti–O bonds in the sharp interfacial region. Experimental results show that the film thickness of Ti coating has a significant impact on bonding quality.
This research was supported by Open Foundation of Jiangsu Provincial Key Laboratory of Photon Manufacturing (grant no. GZ201105) project and the Priority Academic Program Development of Jiangsu Higher Education Institutions. The assistance of Photonic Manufacturing and Science Technology Center of Jiangsu University and support from Industrial Center of Jiangsu University are gratefully acknowledged.