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Surface Engineering Volume 30, 2014 - Issue 8
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Research Papers

Deposition of rock salt AlN coatings by magnetron sputtering

R. K. ChoudharyMaterials Processing Division Bhabha Atomic Research Centre, Mumbai-400085, IndiaCorrespondence[email protected] [email protected]
,
P. MishraMaterials Processing Division Bhabha Atomic Research Centre, Mumbai-400085, India
&
R. C. HubliMaterials Processing Division Bhabha Atomic Research Centre, Mumbai-400085, India
Pages 535-539 | Received 23 Jan 2014, Accepted 12 Mar 2014, Published online: 11 Apr 2014
 
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Abstract

Cubic aluminium nitride (AlN) coatings were successfully deposited on stainless steel 304L substrates by balanced magnetron sputtering. Grazing incidence X-ray diffraction measurement confirmed the formation of rock salt cubic AlN having a preferred orientation along (111) plane. Scanning electron microscopy revealed nodular microstructure of the coating. Thermal diffusivity of AlN coated sample was found to be significantly higher than that of the uncoated sample. Microscratch adhesion test showed no adhesive failure below 20 N loads.

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