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Research Article

Bias influence on titanium interlayer for titanium nitride films

, , , , , & show all
Pages 279-283 | Received 03 Apr 2015, Accepted 17 Jun 2015, Published online: 25 Feb 2016
 

Abstract

This work investigates the deposition of TiN thin films by cathodic arc evaporation on stainless steel AISI 304 substrate for decorative applications. The applied voltage bias on the substrate during the Ti interlayer deposition was varied, and several properties were determined. The chemical profile, crystalline structure and microstructural properties were analysed by glow discharge optical emission spectroscopy, glancing angle X-ray diffraction and SEM techniques respectively. In addition, nanoindentation and sliding tests were performed in order to evaluate the hardness and scratch resistance of TiN thin films. The results showed that the applied voltage bias during the Ti interlayer deposition step could modify some properties of the TiN thin films. Indeed, lower oxygen contents and higher critical loads to start a plastic deformation (scratch resistance) of the TiN thin films are achieved at higher applied voltage biases during the Ti interlayer deposition. A higher scratch resistance is capable of imparting a long term durability of metallic pieces for decorative applications.

Acknowledgements

The authors are grateful to UCS, INCT-INES-CNPq (#554336/2010-3), CAPES (Brafitec 087/11), FAPERGS, Plasmar Tecnologia Ltda. and Fineza Ltda. for financial support. GCL, FC, IJRB and CAF are CNPq fellows. CMM is CAPES fellow.

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