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Abstract
Surface engineered thin films have a great commercial importance in a wide range of applications including precision engineering, data storage, microelectronics, automotive and many others. Regardless of the techniques used to fabricate the films, there is a need to analyse and characterise them to ensure that they will meet performance specifications. This review paper describes how surface and near surface analysis techniques are used to characterise thin films, providing suitable information for development, quality assurance and failure analysis. Quantification is frequently a challenge and various approaches are discussed.