Fabrication of Interdigitated Electrodes using Molecular Beam Epitaxy and Optical Lithography

References

• Alexander, F., Jr., D. T. Price, and S. Bhansali. 2010. Optimization of interdigitated electrode (IDE) arrays for impedance based evaluation of Hs 578 T cancer cells. Journal of Physics: Conference Series 224: 012134. doi:10.1088/1742-6596/224/1/012134
   Google Scholar
• Azzam, R. M. A., and N. M. Bashra. 1977. Ellipsometry and polarized light. Amsterdam, The Netherlands: Elsevier.
   Google Scholar
• Chou, K.-S., and C.-H. Lee. 2014. Fabrication of silver interdigitated electrode by a stamp method. Advances in Materials Science and Engineering 2014: 1–5. doi:10.1155/2014/514508
   Web of Science ®Google Scholar
• Couniot, N., D. Flandre, L. A. Francis, and A. Afzalian. 2013. Signal-to-noise ratio optimization for detecting bacteria with interdigitated microelectrodes. Sensors and Actuators B: Chemical 189: 43–51. doi:10.1016/j.snb.2012.12.008
   Web of Science ®Google Scholar
• Fang, X., H. Zhang, F. Zhang, F. Jing, H. Mao, Q. Jin, and J. Zhao. 2012. Real-time monitoring of strand-displacement DNA amplification by a contactless electrochemical microsystem using interdigitated electrodes. Lab on a Chip 12: 3190–96. doi:10.1039/c2lc40384f
   PubMed Web of Science ®Google Scholar
• Fujiwara, H. 2007. Spectroscopic ellipsometry-principles and applications. Chichester, UK: John Wiley and Sons, Ltd.
   Google Scholar
• Ghorbanpour, M., and C. Falamaki. 2013. A novel method for the production of highly adherent Au layers on glass substrates used in surface plasmon resonance analysis: Substitution of Cr or Ti intermediate layers with Ag layer followed by an optimal annealing treatment. Journal of Nanostructure in Chemistry 3: 66. doi:10.1186/2193-8865-3-66
   Google Scholar
• Lee, J., S. Cho, J. Lee, H. Ryu, J. Park, S. Lim, B. Oh, et al. 2013. Wafer-scale nanowell array patterning based electrochemical impedimetric immunosensor. Journal of Biotechnology 168: 584–88. doi:10.1016/j.jbiotec.2013.08.029
   PubMed Web of Science ®Google Scholar
• Liu, F., G. Kolesov, and B. A. Parkinson. 2014. Time of flight electrochemistry: Diffusion coefficient measurements using interdigitated array (IDA) electrodes. Journal of the Electrochemical Society 161: H3015–19. doi:10.1149/2.0041413jes
   Google Scholar
• Lu, Y., Y. Yao, Q. Zhang, D. Zhang, S. Zhuang, H. Li, and Q. Liu. 2014. Olfactory biosensor for insect semiochemicals analysis by impedance sensing of odorant-binding proteins on interdigitated electrodes. Biosensors and Bioelectronics 67: 662–69. doi:10.1016/j.bios.2014.09.098
   PubMed Web of Science ®Google Scholar
• Min, J., and A. J. Baeumner. 2004. Characterization and optimization of interdigitated ultramicroelectrode arrays as electrochemical biosensor transducers. Electroanalysis 16: 724–29. doi:10.1002/elan.200302872
   Web of Science ®Google Scholar
• Rahman, M. S. A., S. C. Mukhopadhyay, and P.-L. Yu. 2014. Novel sensors for food inspection: Modelling, fabrication and experimentation. Cham, Switzerland: Springer International.
   Google Scholar
• Settu, K., J. T. Liu, C. J. Chen, J. Z. Tsai, and S. J. Chang. 2013. Concept for E.coli detection using interdigitated microelectrode impedance sensor. Conference Proceedings: … Annual International Conference of the IEEE Engineering in Medicine and Biology Society 2013: 1712–15. doi:10.1109/embc.2013.6609849
   PubMedGoogle Scholar
• Shi, M., Y. Peng, J. Zhou, B. Liu, Y. Huang, and J. Kong. 2006. Immunoassays based on microelectrodes arrayed on a silicon chip for high throughput screening of liver fibrosis markers in human serum. Biosensors and Bioelectronics 21: 2210–16. doi:10.1016/j.bios.2005.11.011
   PubMed Web of Science ®Google Scholar
• Shim, J. S., M. J. Rust, and C. H. Ahn. 2013. A large area nano-gap interdigitated electrode array on a polymer substrate as a disposable nano-biosensor. Journal of Micromechanics and Microengineering 23: 035002. doi:10.1088/0960-1317/23/3/035002
   Google Scholar
• Wang, H., Y. Liu, C. Wang, J. Chen, X. Wu, P. Dong, and D. Di. 2013. Interdigitated microelectrodes biosensor with nanodot arrays for thyroid-stimulating hormone detection. Micro & Nano Letters 8: 11–14. doi:10.1049/mnl.2012.0776
   Web of Science ®Google Scholar
• Wang, Y., Z. Ye, and Y. Ying. 2012. New trends in impedimetric biosensors for the detection of foodborne pathogenic bacteria. Sensors 12: 3449–71. doi:10.3390/s120303449
   PubMed Web of Science ®Google Scholar
• Xiao, L., Q. Liu, Z. Hu, W. Zhang, H. Yu, and P. Wang. 2011. A multi-scale electrode array (MSEA) to study excitation–contraction coupling of cardiomyocytes for high-throughput bioassays. Sensors and Actuators B: Chemical 152: 107–14. doi:10.1016/j.snb.2010.09.006
   Web of Science ®Google Scholar
• Yang, L., A. Guiseppi-Wilson, and A. Guiseppi-Elie. 2011. Design considerations in the use of interdigitated microsensor electrode arrays (IMEs) for impedimetric characterization of biomimetic hydrogels. Biomedical Microdevices 13: 279–89. doi:10.1007/s10544-010-9492-4
   PubMed Web of Science ®Google Scholar