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Applicable Analysis
An International Journal
Volume 88, 2009 - Issue 4
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Original Articles

Approximation of Hopkins equation in Hilbert space and its application in polarized illumination modelling

Junjiang Lei Synopsys Inc, 700 E. Middlefield Rd., Mountain View, CA 94043, USA
,
Jie-Chang Wen Faculty of Applied Mathematics, GuangDong University of Technology, Guangzhou, P.R. China
,
Min A Department of Mathematics, Southern Illinois University, Carbondale, IL 62901, USA
&
Mingqing Xiao Department of Mathematics and Computer Science, Coppin State University, Baltimore, MD 21216, USACorrespondence[email protected]
Pages 517-528 | Received 06 Feb 2009, Accepted 04 Mar 2009, Published online: 16 Jun 2009

References

  • Brunner , TA and Ferguson , RA . 1996 . Approximate models for resist processing effects . Proc. SPIE , 2726 : 198 – 207 .
  • Cobb , NB , Zakhor , A and Miloslavsky , E . 1996 . Mathematical and CAD framework for proximity correction . Proc. SPIE , 2726 : 208 – 222 .
  • Cobb , NB , Zakhor , A , Reihani , M , Jahansooz , F and Raghavan , VN . 1997 . Experimental results on optical proximity correction with variable-threshold resis model . Proc. SPIE , 3051 : 458 – 468 .
  • Granik , Y , Cobb , NB and Do , T . 2002 . Universal process modeling with VTRE for OPC . Proc. SPIE , 4691 : 377 – 394 .
  • Randall , J , Ronse , K , Marschner , T , Goethals , M and Ercken , M . 1999 . Variable-threshold resist models for lithoraphy simulation . Proc. SPIE , 3679 : 176 – 182 .
  • Hopkins , HH . 1951 . The concept of partial coherence in a optice . Proc. Roy. Soc , A208 : 263 – 277 .
  • Lei , Junjiang , Bai , Min , Shiely , Jim and Zhang , Lin . 2005 . Hopkins equation in a Hilbert space and its application in polarized illumination modeling . Proc. SPIE , 5754 : 953 – 960 .
  • Born , M and Wolf , E . 1999 . Principles of Optics , 7th ed. , Oxford : Pergamon Press .
  • Yeung , M . 1988 . Modeling high numerical aperture optical lithography . Proc. SPIE , 922 : 149 – 167 .
  • Flagello , DG , Milster , T and Rosenbluth , AE . 1996 . Theory of high-NA imaging in homogeneous thin films . J. Opt. Soc. Am. A , 13 ( 1 ) : 53 – 64 .
  • Bai , M , Lei , J , Shiely , J and Zhang , L . 2004 . Simulations of Immersion Lithography . Proc. SPIE , 5754 : 961
  • Mansuripur , M . 1986 . Distribution of light at and near the focus of high-numerical-aperture objectives . J. Opt. Soc. Am. A , 3 ( 12 ) : 2086 – 2093 .
  • Hochstadt , H . 1989 . Integral Equations , New York : John Wiley & Sons Inc .
  • Carmeli , C , Vito , EDe and Toigo , A . 2006 . Vector valued reproducing kernel Hilbert spaces of integrable functions and Mercer theorem . Anal. Appl. (Singap.) , 4 : 377 – 408 .
  • Higgins , PL , Butzer , JR and Stens , RL . 2000 . “ Sampling theory of signal theory ” . In Development of Mathematics 1950–2000 , Edited by: Pier , J-P . 193 – 234 . Basel : Birkhauser Verlag .
  • Lei , J , Cheney , WE and Jia , R . 1997 . Approximation from shift invariant spaces by integral operators . SIAM J. Math. Anal. , 28 : 481 – 498 .
  • Lei , J and Butzer , P . 2000 . Approximation of signals using measured sampled values . Commun. Appl. Anal. , 4 ( 2 ) : 245 – 255 .

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