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Ferroelectrics Volume 241, 2000 - Issue 1
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Section XV: Thin films

Effects of film thickness and grain size on the electrical properties of Pb(Zr,Ti)O3 thin films prepared by MOCVD

Masaru Shimizu Department of Electronics, Himeji Institute of Technology, 2167 Shosha, Himeji, Hyogo, 671-2201, Japan
,
Seiji Nakashima Department of Electronics, Himeji Institute of Technology, 2167 Shosha, Himeji, Hyogo, 671-2201, Japan
,
Kazuyuki Kaibara Department of Electronics, Himeji Institute of Technology, 2167 Shosha, Himeji, Hyogo, 671-2201, Japan
,
Hironori Fujisawa Department of Electronics, Himeji Institute of Technology, 2167 Shosha, Himeji, Hyogo, 671-2201, Japan
&
Hirohiko Niu Department of Electronics, Himeji Institute of Technology, 2167 Shosha, Himeji, Hyogo, 671-2201, Japan
Pages 183-190 | Received 12 Jul 1999, Published online: 09 Mar 2011

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