LiTaO₃ Thin Films Prepared by a Diol-Based Sol-Gel Process and Crystallized by Conventional and RTA Processes

Ming-Cheng Kao Department of Electrical Engineering National Sun Yat-Sen University, Kaohsiung, Taiwan, R.O.C.

Ying-Chung Chen Department of Electrical Engineering National Sun Yat-Sen University, Kaohsiung, Taiwan, R.O.C.

Chih-Ming Wang Department of Electrical Engineering Cheng-Shiu Institute of Technology, Kaohsiung, Taiwan, R.O.C.

Hone-Zern Chen Department of Electrical Engineering Hsiuping Institute of Technology, Taichung, Taiwan, R.O.C.

References

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LiTaO₃ Thin Films Prepared by a Diol-Based Sol-Gel Process and Crystallized by Conventional and RTA Processes

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LiTaO₃ Thin Films Prepared by a Diol-Based Sol-Gel Process and Crystallized by Conventional and RTA Processes