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Ferroelectrics Volume 380, 2009 - Issue 1
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Original Articles

Requirements for Piezoelectric Thin Film Applications to Radio Frequency Acoustic Wave Devices

Ken-Ya Hashimoto Graduate School of Engineering, Chiba University, Chiba, 263-8522, Japan
,
Tatsuya Omori Graduate School of Engineering, Chiba University, Chiba, 263-8522, Japan
&
Masatsune Yamaguchi Graduate School of Engineering, Chiba University, Chiba, 263-8522, Japan
Pages 73-80 | Received 03 Aug 2008, Accepted 31 Dec 2008, Published online: 20 Sep 2010

References

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  • Taniguchi , S. , Yokoyama , T. , Iwaki , M. , Nishihara , T. , Ueda , M. and Satoh , Y. An air-gap type FBAR filter fabricated using a thin sacrificed layer on a flat substrate . Proc. IEEE Ultrasonics Symp. pp. 600
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  • Kadota , M. , Nakao , T. , Nishiyama , K. , Kido , S. , Kato , M. , Omote , R. , Yonekura , H. , Takada , N. and Kita , R. Small (3 × 2.5mm2) surface acoustic wave duplexer for W-CDMA with good temperature and frequency characteristics . Proc. IEEE Ultrason. Symp. pp. 827 – 831 .
  • Ieki , H. and Kadota , M. ZnO thin films for high frequency SAW devices . Proc. IEEE Ultrason. Symp. pp. 281 – 290 .
  • Nakahata , H. , Higaki , K. , Fujii , S. , Hachigo , A. , Kitabayashi , H. , Tanabe , K. , Seki , Y. and Shikata , S. SAW devices on diamond . Proc. IEEE Ultrason. Symp. pp. 621 – 629 .
  • Omori , T. Proc. Int' l Symp. Appl. Ferroelec. pp. 750 – 751 .

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