Microstructure and Ferroelectric Properties of Direct-Patternable Bi_3.25La_0.75Ti₃O₁₂ Films Prepared by Photochemical Metal-Organic Deposition

References

• Araujo , C. A. , Cuchiaro , J. D. , McMillan , L. D. , Scott , M. C. and Scott , J. F. 1995 . Fatigue-free ferroelectric capacitors with platinum electrodes . Nature , 374 : 627 – 629 .
   Web of Science ®Google Scholar
• Simões , A. Z. , Stojanovic , B. D. , Ramirez , M. A. , Cavalheiro , A. A. , Longo , E. and Varela , J. A. 2008 . Lanthanum-doped Bi4Ti3O12 prepared by the soft chemical method: Rietveld analysis and piezoelectric properties . Ceram. Int. , 34 : 257 – 261 .
   Web of Science ®Google Scholar
• Kim , Y. M. , Jang , G. E. , Kim , N. K. , Yeom , S. J. and Kweon , S. Y. 2007 . Grain Size and Orientation Control in Lead-Free (Bi,La)4Ti3O12 Thin Film Deposited by Spin-On Method for High Density FeRAM Device . Mater. Sci. Forum. , 544–545 : 577 – 580 .
   Google Scholar
• Park , B. H. , Kang , B. S. , Bu , S. D. , Noh , T. W. , Lee , J. and Jo , W. 1999 . Lanthanum-substituted bismuth titanate for use in non-volatile memories . Nature , 401 : 682 – 684 .
   Web of Science ®Google Scholar
• Lee , H. N. , Hesse , D. and Zakharov , N. 2002 . and U. Gösele, Ferroelectric Bi3.25La0.75Ti3O12 films of uniform a-axis orientation on silicon substrates . Science , 296 : 2006 – 2009 .
   PubMed Web of Science ®Google Scholar
• Lee , J. K. , Kim , T. , Chung , I. and Desu , S. B. 1999 . Characterization and elimination of dry etching damaged layer in Pt/Pb(Zr0.53Ti0.47)O3/Pt ferroelectric capacitor . Appl. Phys. Lett. , 75 : 334 – 336 .
   Web of Science ®Google Scholar
• Soyer , C. , Cattan , E. , Remiens , D. and Guilloux-Viry , M. 2002 . Ion beam etching of lead-zirconate-titanate thin films: Correlation between etching parameters and electrical properties evolution . J. Appl. Phys. , 92 : 1048 – 1055 .
   Web of Science ®Google Scholar
• Kim , J. , Kim , G. , Kim , K. and Kim , C. 2006 . Etch damage evaluation on (Bi4 − x La x )Ti3O12 thin films during the etch process using inductively coupled plasma sources . Mat. Sci. Semicon. Proc. , 9 : 1108 – 1114 .
   Google Scholar
• Kim , D. , Kim , K. , Kim , C. and Efremov , A. M. 2004 . Etching mechanism of Bi4 − x La x Ti3O12 films in Ar/Cl2 inductively coupled plasma . Thin Solid Films , 447–448 : 343 – 348 .
   Google Scholar
• Avey , A. A. and Hill , R. H. 1996 . Solid state photochemistry of Cu2(OH2 2(O2C(CH2 4CH3 4 in thin films: The photochemical formation of high-quality films of copper and copper(I) oxide. Demonstration of a novel lithographic technique for the patterning of copper . J. Am. Chem. Soc. , 118 : 237 – 238 .
   Web of Science ®Google Scholar
• Law , W. L. and Hill , R. H. 2000 . Photolithographic deposition of insulating Al2O3 films from thin amorphous films of aluminum complexes on silicon surfaces . Thin Solid Films , 375 : 42 – 45 .
   Google Scholar
• Kim , K. and Kim , C. 2004 . Effect of bismuth excess on the crystallization of Bi3.25La0.75Ti3O12 thin films on Pt/Ti/SiO2/Si substrates . Microelectron Eng. , 71 : 266 – 271 .
   Google Scholar
• Park , H. , Park , H. and Hill , R. H. 2006 . Direct-patterning of SnO2 thin film by photochemical metal-organic deposition . Sens. Actuators A , 132 : 429 – 433 .
   Google Scholar
• Chen , H. Y. , Lin , J. , Tan , K. L. and Feng , Z. C. 1996 . Characterization of lead lanthanum titanate thin films grown on fused quartz using MOCVD . Thin Solid Films , 289 : 59 – 64 .
   Google Scholar
• Ke , H. , Zhou , Y. , Jia , D. C. , Wang , W. and Xu , X. Q. 2005 . Crystallization and nanograin growth in SrBi2Ta2O9 synthesized by a novel sol–gel process . J. Sol-Gel Sci. Techn. , 34 : 131 – 136 .
   Web of Science ®Google Scholar
• Kim , J. S. , Ahn , C. W. , Lee , H. J. , Lee , S. Y. , Kang , S. H. , Kim , I. W. and Lee , K. 2005 . Effects of Nb doping on BiTiO and BiLaTiO ceramics and thin films: Different ferroelectric and electrical properties . J. Korean. Phys. Soc. , 46 : 147 – 150 .
   Google Scholar
• Liu , B. T. , Zhang , W. T. , Wang , Y. , Sun , H. L. , Li , F. , Yan , Z. , Du , J. and Zhao , Q. X. 2007 . Impact of Pt bottom electrode on the properties of ferroelectric Bi3.25La0.75Ti3O12 capacitors . Mater Lett. , 61 : 1933 – 1936 .
   Google Scholar
• Ryu , S. , Lee , N. , Lee , W. and Yoon , S. 2004 . Phase formations and electrical properties of Bi3.15La0.85Ti3O12 and Sm-Doped Bi3.073La0.85Sm0.077Ti3O12 thin films with annealing temperature . Jpn. J. Appl. Phys. , 43 : 6594 – 6598 .
   Google Scholar
• Kim , K. , Kim , C. , Kang , D. and Shim , I. 2002 . Structural and ferroelectric characterization of Bi3.25La0.75Ti3O12 thin films prepared by using metalorganic deposition . J. Korean Phys. Soc. , 41 : 1003 – 1007 .
   Google Scholar
• Yunyi , W. , Duanming , Z. , Jun , Y. and Yunbo , W. 2008 . Effect of excess Bi2O3 on the ferroelectric and dielectric properties of Bi3.25La0.75Ti3O12 thin films by RF sputtering method . Mat. Sci. Eng. B , 149 : 34 – 40 .
   Google Scholar
• Park , H. , Kim , W. S. , Yang , J. , Park , H. and Hill , R. H. 2004 . Characterization of PLZT thin film prepared by photochemical deposition using photosensitive metal-organic precursors . Microelectron Eng. , 71 : 215 – 220 .
   Web of Science ®Google Scholar