240
Views
12
CrossRef citations to date
0
Altmetric
SECTION G: FERROELECTRIC THIN AND THICK FILMS

Optimization of Pt and PZT Films for Ferroelectric-Gate Thin Film Transistors

, , , , &
Pages 281-291 | Received 23 Aug 2009, Accepted 19 Oct 2009, Published online: 01 Dec 2010

References

  • Carcia , P. F. , McLean , R. S. and Reilly , M. H. 2006 . Appl. Phys. Lett. , 88 : 123509 – 11 .
  • Nomura , K. , Ohta , H. , Takagi , A. , Kamiya , T. , Hirano , M. and Hosono , H. 2004 . Nature (London) , 432 : 488 – 91 .
  • Miyasako , T. , Senoo , M. and Tokumitsu , E. 2005 . Appl. Phys. Lett. , 86 : 162902 – 04 .
  • Nasu , T. , Kibe , M. , Uemoto , Y. , Fujii , E. and Otsuki , T. 1998 . Jpn. J. Appl. Phys. , 37 : 4144 – 48 .
  • Kweon , S. Y. , Yeom , S. J. , SunHJ , Kim , N. K. , Yu , Y. S. and Lee , S. K. 1999 . Integrat. Ferroelectr. , 25 : 299
  • Choi , H. M. and Choi , S. K. 1995 . J. Vac. Sci & Technol. A. , 13 : 2832 – 35 .
  • Thomson , J. A. 1974 . J. Vac. Sci & Technol. A. , 11 : 666
  • Thomson , J. A. 1986 . J. Vac. Sci & Technol. A. , 4 : 3059 – 65 .
  • Kim , S. T. , Kim , H. H. , Lee , M. Y. and Lee , W. J. 1997 . Jpn. J. Appl. Phys. , 36 : 294 – 300 .
  • Sproul , W. D. and Legg , K. O. 1994 . 15 Technomic Publishing Company .
  • Chen , S. Y. and Chen , I. W. 1999 . J. Am. Ceram. Soc. , 81 : 97
  • Tani , T. , Xu , Z. and Payne , D. A. 1993 . Mater. Res. Soc. Symp. Proc. , 310 : 269 – 74 .
  • Liu , Y. and Phule , P. P. 1996 . J. Am. Ceram. Soc. , 792 : 495
  • Kagan , C. Y. and Andry , P. W. Y. 2003 . Thin Film Transistors , New York : Dekker .
  • Seager , S. H. , Mcintyre , D. , Tuttle , B. A. and Evans , J. 1997 . Integrat. Ferroelectr. , 6 : 45
  • Prins , M. W. J. , Zinnemers , S. E. , Cillessen , J. F. M. and Giesbers , J. B. 1997 . Appl. Phys. Lett. , 70 : 458 – 60 .

Reprints and Corporate Permissions

Please note: Selecting permissions does not provide access to the full text of the article, please see our help page How do I view content?

To request a reprint or corporate permissions for this article, please click on the relevant link below:

Academic Permissions

Please note: Selecting permissions does not provide access to the full text of the article, please see our help page How do I view content?

Obtain permissions instantly via Rightslink by clicking on the button below:

If you are unable to obtain permissions via Rightslink, please complete and submit this Permissions form. For more information, please visit our Permissions help page.